A Focused Ion Beam Specimen Preparation Method to Minimize Gallium Ion Concentration in Copper Atom-Probe Tomography Specimen Tips
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منابع مشابه
A Focused Ion Beam Specimen Preparation Method to Minimize Gallium Ion Concentration in Copper Atom-Probe Tomography Specimen Tips
Atom-probe tomography (APT) is a quantitative technique that permits three-dimensional (3-D) spectroscopic characterization of interfaces and other nanometer-scale features within a material. Specimens for atom-probe tomography (APT) analysis of semiconductor devices and nanostructured materials are typically fabricated employing a focused ion beam (FIB) instrument [1 3] or a dual-beam FIB inst...
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Atom Probe (AP) tomography is maturing into a routine method for the atomic resolution compositional analysis of metals, semiconductors and some polymers. This is often combined with a Transmission Electron Microscope (TEM) analysis of the same region of interest. The Focused Ion Beam (FIB) microscope has evolved as an essential tool for site and orientation specific sample preparation for such...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2014
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s143192761400347x